102~37nm20X57nm710nm7nm7nm7nm7nm7nm20X8EUV10nm7nm10nm10nm7nm7nm7nm10nm5nm7nm7nm20%7nm7nm7nmEUV13nm10nm7nm7nmSX-10004538317nm7nm+45SX-10007nm791011150020045.7%30%71220050%101004007nm

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